Precision Measurement and Control for OEM System Integration
DDI process controllers deliver the highest value in reliable, precise analog to digital signal processing and closed-loop control.
Precision Temperature Sensor Monitoring
Advanced Temperature Control
Over/Under Temperature Interlock Control
Model Based Control
Programmable Interlock Control
On-board Diagnostics
Fusion.TC
Temperature Control with SIL-rated Functional Safety
- Thermocouple & RTD, all types supported
- Temperature readback
- Temperature monitoring, SIL3-rated over/undertemp
- Temperature control with PID
- Up to 64 PID loops (non-SIL), 48 PID loops (SIL3)
- Digital filters
- Configurable PWM output for SSR gate control
- Setpoint ramp
- Available to OEMs with custom channel configurations
Intellimatch
RF Plasma Power Measurement with VI Sensing and Control
- Pair with DDI VI Sensor
- Probe voltage and current (V & I)
- Reports phase angle
- Reads harmonics
- Sensor calibration | Pair with a DDI high-precision VI sensor
- Synchronize measurement across multiple V-I channels
- EtherCAT interface
- Multi-channel algorithmic matching available as an option
- Available stand-alone for OEM designed matches
- Available for integration within an OEM designed match